MRF, Inc Custom Furnaces

If your application does not fit standard furnaces, you've come to the right place. MRF, Inc continuously designs and builds new products from the ground up for new production and research applications. MRF also builds many custom chambers for integration with other equipment or instrumentation. MRF's philosophy is to build furnaces to suite the specific needs of our customers and thus we end up designing many exclusive furnaces unique for each customer. Below is a sample of our one-of-a-kind furnaces.

• 8 station wafer indexer
• Neutron beam furnace
• Steam Furnace
• Rocking furnace for growing crystals
• Custom chambers

8 Station Semi-conductor Wafer Indexer

General Specifications: 1 hot zone station- 7 cool statoins 1100oC in vacuum atmosphere High precision DC power supply Servo controlled motion Large rear access port Large loading door Evacuation and inert gas system

1100C 8 station furnace

This system was designed specifically for ion-beam processing of 2" or 3" semi-conductor wafers at elevated temperatures. It consists of a tabletop furnace with a high precision DC powersupply and indexing system.The indexing system allows precise control of the wafer position and permits batch processing of 8 wafers per run. The wafers are rotated to the heater and will be heated up in a matter of seconds before the ion-beam processing can commence. Temperature is controlled by an optical pyrometer reading the surface temperature of the heated wafer. A large access port allows attachement of the ion beam instrumentation. The furnace is a complete turn key system with a vacuum system, inert gas system, indexing servo controls , temperature controls and water cooling.

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Neutron Beam Furnace

General Specifications: 1800C Turbo pumping system Horizontal heating elements Large access chamber Labview interface Mounts in test frame

A government research system involving neutron beam bombardment at elevated temperatures with stressed materials under a controlled vacuum atmosphere, and that's probably saying too much.

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Steam Furnace

General Specifications: 1000C 8" diameter x 2" usable zone Embedded heating elements Adjustable wet or dry steam generator Mounts in test equipment

This custom furnace was designed for a government agency to process ceramic materials under special conditions. The steam atmosphere generated by this furnace included one of the process requirements for the customer. The design for this unique application process is yet another example of MRF's custom design philosophy meeting the needs of our customers and their special application processes.

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Custom chambers

MRF designs many furnace systems and chambers for integration with other systems and instruments not supplied by us. We work closely with the suppliers of the other systems to ensure a perfect marriage and complete compatibilty. Large or small, you'll be impressed by our "can do" attitude.

	This ultra high vacuum system can reach pressures as low as 1E-11 Torr.
A furnace chamber designed for accepting different "in chamber" sensors and for integration in a physical test frame (see our physical test systems)	A 35 cu. Ft chamber made for a Physical test frame with X and Y biaxial stress testing.(see our physical test systems)

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