Materials Research Furnaces, Inc

 

    

 

 1 CuFt Heat Treating Furnace

General specifications:
  • Up to 2200C
  • Hydrogen, Inert gas or vacuum Atmosphere
  • Diffusion pumping system
  • Heat Exchanger
  • 12" x 12" x12" usable hot zone
  • Excellent temperature uniformity
  • Wafer-heating element for long life and low cost
  • User friendly HMI Computer Interface
  • other options and add-ons available
Heat treat furnace
1Cu Ft Heat treating furnace

Our mid-sized heat treating furnace contains a 1 cubic foot usable zone capable of temperatures up to 2200C and can be equipped with many options. The unit shown here features a gas purifier (oxygen getterer), a 10" cryo pumping system, and our computer interface package. Other options we have provided on this heat treat furnace include operation in Hydrogen, diffusion pumping systems, heat exchanger for rapid cooling in gas, pyrometer, etc. In other words, we will customize our furnaces to your specific needs. The hot zone features tungsten rod heating elements formed into a wafer, insuring excellent uniformity and longivity at a reasonable cost. This furnace comes equipped with an intuitive and easy to use computer interface, allowing full control of the furnace. In addition it provides data trends and storage ( Data acquisition), display and logging of alarms, unlimited recipe profiles temperature control, security, etc. The PC is an industrial flat panel PC mounted in the control console and is built to withstand harsh environments. The furnace can be used for both R&D or as a batch furnace for production.


Major parts:
  1. Chamber and hot zone
  2. Power supply & controls
  3. Vacuum system
  4. Gas system
  5. Water cooling
  6. Utilities

HMI sample

 

Chamber and hot zone

The chamber is loaded from the front and contains a Hot Zone with a 12" x 12" x 12" usable zone and a +/- 10C temperature gradient. The heating element is comprized of 4 identical tungsten rod panels, providing 4 sided heating. The elements are rugged and feature excellent uniformity at a low cost. Mesh heaters are available as well. The furnace chamber is manufactured from doubled-walled stainless steel welded together and polished for a clean finish and good vacuum integrity. Plenty of ports are incorporated for auxliary equipment and sensors. The hot zone shields are mounted in a chamber frame, allowing for the thermal growth of the zone during the heat cycling. The optional gas heat exchanger allows for quick-cooling down to room temperature.
The furnace load is placed on the load frame. The load frame supports are engineered to feature a high load capacity and a low thermal conductivity loss to the chamber walls.

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Power Supply & controls

Power to the hot zone is supplied by a Three Phase SCR controlled power supply, including a circuit breaker, a contactor, an SCR to modulate the power to the hot zone, a main stepdown transformer matched to meet the heating element resistance, Volt and Amp Meters, and a set of water-cooled power cables to supply power to the furnace.

Two control options are available, a control panel with switches, lights, temperature controller and vacuum instrument, or a Computer Interface package with HMI software and Industrial touchpanel PC. Both offer full control of the furnace and are easy to operate. The Computer package adds data acquisition, alarms, recipe storage, security and networking.

If optioning for the computer package, the PLC is used to control temperature, and other system components such as vacuum and gas. Since the instrument reads and controls temperature and pressure, other instruments can be eliminated thus simplifying operation and configuration.The controller interfaces with the PC and transmits the temperature,power and vacuum readings. This instrument also controls all digital logic required to control the solenoid valves, motor starters, interlocks, gas system, and vacuum system. HMI image sample
HMI Sample screen

A type "C" sheathed and coated thermocouple is supplied and can be used to measure the furnace temperature up to 2300C. A safety over-temperature controller will shut of power to the hot zone if the maximum temperature is exceeded.

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Vacuum System

Many differrent vacuum systems are available on this system, depending on the atmospheric requirements:

  • The basic system, an evacuation system, consists of a Rotary Vane mechanical pump, an electro-pneumatic
    vacuum valve, and vacuum gauge. This vacuum system will allow for operation in a vacuum environment (10-2 to 10-3 Torr range).
  • A 4", 6" or 10" diffusion pumping system can be provided as well to achieve vacuum levels down to 10-6 Torr. All our diff pump systems include a refrigerated cold trap to prevent oil backstreaming and to obtain a lower ultimate vacuum.
  • A turbo pumping system or cryo pumping system can be provided with a "dry" roughing pump to provide an oil-less vacuum system for ultra clean environments and to obtain a vacuum level of 10-7 to 10-8 Torr range.

For more information on our vacuum systems, please visit our technical page.

Gas System

An inert or Hydrogen gas system can be supplied to provide an inert or reducing environment for the work samples during the heat testing. The process Gas System (Argon): includes solenoid-operated inlet valve, a Compound Gauge (30 P.S.I.G. x 30 in. Hg.), a gas flow meter, and a 2 P.S.I.G. outlet relief valve to maintain a positive pressure. There is also a 5 P.S.I.G. over-pressure safety relief valve. For operation in Hydrogen, additional solenoids and sensors are supplied to provide safe and reliable operation. A burn-off kit will burn and monitor any flammable gas exiting the furnace, a safety blow-off port is provided to relieve any excessive chamber pressure. For a quick cool down to atmosphere in gas, a water cooled gas heat exchanger can be provided.

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Water cooling system

The Furnace Water cooling manifold consists of multiple circuits to adequately cool all the furnace parts and includes a strainer, pressure regulator, pressure gauge, water inlet and outlet manifold, a water flow switch as a visual water flow indicator with a flow interlock to protect the furnace in the event of a water flow failure. This switch turns off power to the hot zone contactor if water flow is below recommended minimum for a certain amount of time. Each part of the furnace is supplied with a separate cooling circuit that can be regulated by independent manual ball valves.

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Utilities

Power: 380-480-575 V/3/50-60 Hz
Water: 10 G.P.M. @ 60 o F and 50 P.S.I.G.
Process Gas: Argon or Nitrogen, Hydrogen 40 L.P.M. @ 50 P.S.I.G.
Compressed Air: 60-90 P.S.I.G. filtered.

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